Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074541 | Deposition of smooth metal nitride films | Jaakko Anttila | 2018-09-11 |
| 10056249 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest +3 more | 2018-08-21 |
| 10043880 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Suvi Haukka, Eva Tois | 2018-08-07 |
| 9941425 | Photoactive devices and materials | Hannu Huotari | 2018-04-10 |