Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115603 | Removal of surface passivation | Antti Niskanen | 2018-10-30 |
| 10074541 | Deposition of smooth metal nitride films | Tom E. Blomberg | 2018-09-11 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2018-06-19 |