Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10118828 | Tritertbutyl aluminum reactants for vapor deposition | Mohith Verghese | 2018-11-06 |
| 10087522 | Deposition of metal borides | Petri Raisanen, Suvi Haukka, Robert Brennan Milligan, Michael Eugene Givens | 2018-10-02 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2018-06-19 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Todd Robert Dunn +2 more | 2018-02-13 |
| 9873942 | Methods of vapor deposition with multiple vapor sources | Christophe Pomarede, Mohith Verghese, Jan Willem Maes, Chang-Gong Wang | 2018-01-23 |