Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10009961 | Local temperature control of susceptor heater for increase of temperature uniformity | — | 2018-06-26 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Eric James Shero, Todd Robert Dunn +2 more | 2018-02-13 |