Issued Patents 2018
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157786 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2018-12-18 |
| 10147600 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2018-12-04 |
| 10087522 | Deposition of metal borides | Petri Raisanen, Eric James Shero, Robert Brennan Milligan, Michael Eugene Givens | 2018-10-02 |
| 10047435 | Dual selective deposition | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |
| 10049924 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2018-08-14 |
| 10043880 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Tom E. Blomberg, Eva Tois | 2018-08-07 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2018-06-19 |
| 9905416 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda | 2018-02-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |
| 9875893 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2018-01-23 |