Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041166 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2018-08-07 |
| 10014212 | Selective deposition of metallic films | Toshiharu Watarai, Takahiro Onuma, Dai Ishikawa, Kunitoshi Namba | 2018-07-03 |
| 9947582 | Processes for preventing oxidation of metal thin films | Aurélie Kuroda, Takahiro Onuma, Dai Ishikawa | 2018-04-17 |
| 9905416 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2018-02-27 |