Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157786 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2018-12-18 |
| 10147600 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2018-12-04 |
| 10115603 | Removal of surface passivation | Jaakko Anttila | 2018-10-30 |
| 10047435 | Dual selective deposition | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |
| 10049924 | Selective formation of metallic films on metallic surfaces | Suvi Haukka, Marko Tuominen | 2018-08-14 |
| 10041166 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Han Wang, Qi Xie, Jan Willem Maes, Shang Chen +4 more | 2018-08-07 |
| 9905416 | Si precursors for deposition of SiN at low temperatures | Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka | 2018-02-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |
| 9875893 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Suvi Haukka, Ryu Nakano +1 more | 2018-01-23 |