Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056249 | Atomic layer deposition of antimony oxide films | Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2018-08-21 |
| 10047435 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |
| 9929009 | Cyclical deposition of germanium | — | 2018-03-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |