Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041166 | Reaction chamber passivation and selective deposition of metallic films | Delphine Longrie, Antti Niskanen, Han Wang, Qi Xie, Jan Willem Maes +4 more | 2018-08-07 |
| 10014212 | Selective deposition of metallic films | Shang Chen, Toshiharu Watarai, Takahiro Onuma, Kunitoshi Namba | 2018-07-03 |
| 9947582 | Processes for preventing oxidation of metal thin films | Aurélie Kuroda, Shang Chen, Takahiro Onuma | 2018-04-17 |