Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002755 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Viljami Pore, Seiji Okura | 2018-06-19 |
| 9909214 | Method for depositing dielectric film in trenches by PEALD | — | 2018-03-06 |