Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2018-12-18 |
| 10014179 | Methods for forming cobalt-copper selective fill for an interconnect | Rong Tao, Xianmin Tang, Joung Joo Lee | 2018-07-03 |
| 10002834 | Method and apparatus for protecting metal interconnect from halogen based precursors | Mehul Naik, Paul F. Ma, Srinivas Guggilla | 2018-06-19 |
| 9938622 | Method to deposit CVD ruthenium | Sang Ho Yu, KieJin Park | 2018-04-10 |