Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083816 | Shielded lid heater assembly | David Palagashvili, Valentin N. Todorow, Stephen Yuen | 2018-09-25 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Xing Lin, Konstantin Makhratchev | 2018-04-17 |
| 9883549 | Substrate support assembly having rapid temperature control | Alexander Matyushkin, Dan Katz, John Holland, Theodoros Panagopoulos | 2018-01-30 |