Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114921 | Method and recording medium of reducing chemoepitaxy directed self-assembled defects | Michael A. Guillorn, Chi-Chun Liu, Ananthan Raghunathan, HsinYu Tsai | 2018-10-30 |
| 10068991 | Patterned sidewall smoothing using a pre-smoothed inverted tone pattern | Hari V. Mallela, Hiroyuki Miyazoe, Reinaldo Vega, Rajasekhar Venigalla | 2018-09-04 |
| 10037398 | Pattern decomposition method for wiring patterns with chemoepitaxy based directed self assembly | Markus Brink, Joy Cheng, Gregory S. Doerk, Michael A. Guillorn, HsinYu Tsai | 2018-07-31 |
| 9984920 | Design-aware pattern density control in directed self-assembly graphoepitaxy process | Hsueh-Chung Chen, Cheng Chi, Lin Hu, Chi-Chun Liu, Jed W. Pitera | 2018-05-29 |