Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10164119 | Vertical field effect transistors with protective fin liner during bottom spacer recess etch | Reinaldo Vega, Rajasekhar Venigalla | 2018-12-25 |
| 10109535 | Method of fabricating vertical field effect transistors with protective fin liner during bottom spacer recess ETCH | Reinaldo Vega, Rajasekhar Venigalla | 2018-10-23 |
| 10068991 | Patterned sidewall smoothing using a pre-smoothed inverted tone pattern | Kafai Lai, Hiroyuki Miyazoe, Reinaldo Vega, Rajasekhar Venigalla | 2018-09-04 |
| 9929058 | Vertical FETS with variable bottom spacer recess | Reinaldo Vega, Rajasekhar Venigalla | 2018-03-27 |
| 9911804 | Vertical fin field effect transistor with air gap spacers | Robert R. Robison, Reinaldo Vega, Rajasekhar Venigalla | 2018-03-06 |
| 9859384 | Vertical field effect transistors with metallic source/drain regions | Robert R. Robison, Reinaldo Vega, Rajasekhar Venigalla | 2018-01-02 |