Issued Patents 2018
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157731 | Semiconductor processing apparatus with protective coating including amorphous phase | Ren-Guan Duan, Kenneth S. Collins | 2018-12-18 |
| 10119188 | Plasma erosion resistant rare-earth oxide based thin film coatings | Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho | 2018-11-06 |
| 10026636 | Electrostatic chuck having reduced power loss | Konstantin Makhratchev | 2018-07-17 |
| 10020170 | Chemistry compatible coating material for advanced device on-wafer particle performance | Biraja P. Kanungo, Dmitry Lubomirsky | 2018-07-10 |
| 9999907 | Cleaning process that precipitates yttrium oxy-flouride | Chengtsin Lee, Yikai Chen | 2018-06-19 |
| 9976211 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Martin Jeff Salinas, Jared Ahmad Lee | 2018-05-22 |
| 9970095 | Ion assisted deposition top coat of rare-earth oxide | Biraja P. Kanungo, Vahid Firouzdor | 2018-05-15 |
| 9957192 | Low temperature fluoride glasses and glazes | Chengtsin Lee | 2018-05-01 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Sehn Thach, Xing Lin, Michael D. Willwerth, Konstantin Makhratchev | 2018-04-17 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Senh Thach, Biraja P. Kanungo, Vahid Firouzdor | 2018-03-13 |
| 9896376 | Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent | Ren-Guan Duan, Kenneth S. Collins | 2018-02-20 |
| 9890086 | Rare-earth oxide based monolithic chamber material | Biraja P. Kanungo | 2018-02-13 |
| 9884787 | Rare-earth oxide based monolithic chamber material | Biraja P. Kanungo | 2018-02-06 |
| 9879348 | High purity metallic top coat for semiconductor manufacturing components | Vahid Firouzdor | 2018-01-30 |
| 9869012 | Ion assisted deposition for rare-earth oxide based coatings | Biraja P. Kanungo, Vahid Firouzdor, Ying Zhang | 2018-01-16 |
| 9869013 | Ion assisted deposition top coat of rare-earth oxide | Biraja P. Kanungo, Vahid Firouzdor | 2018-01-16 |
| 9865434 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Biraja P. Kanungo, Tom K. Cho | 2018-01-09 |