Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2018-10-02 |
| 10010912 | Particle reduction via throttle gate valve purge | Dmitry Lubomirsky, Martin Jeff Salinas, Andrew Nguyen, Tom K. Cho, Eric A. Englhardt +1 more | 2018-07-03 |
| 9976211 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas | 2018-05-22 |
| 9885567 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Martin Jeffrey Salinas, Yi Zhou, Changhun Lee | 2018-02-06 |