Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134579 | Method for high modulus ALD SiO2 spacer | Shankar Swaminathan | 2018-11-20 |
| 10100407 | Hardware and process for film uniformity improvement | Purushottam Kumar, Hu Kang, Adrien LaVoie, Yi Chung Chiu, Frank L. Pasquale +5 more | 2018-10-16 |
| 9970108 | Systems and methods for vapor delivery in a substrate processing system | Jun Qian, Hu Kang, Purushottam Kumar, Heather Landis, Andrew Duvall +11 more | 2018-05-15 |
| 9920844 | Valve manifold deadleg elimination via reentrant flow path | Karl Leeser, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Ted Minshall +1 more | 2018-03-20 |