Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049927 | Seam-healing method upon supra-atmospheric process in diffusion promoting ambient | Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik, Ellie Yieh +1 more | 2018-08-14 |
| 10014174 | Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning | Pramit Manna, Li Yan Miao, Deenesh Padhi, Bok Hoen Kim, Christopher Dennis Bencher | 2018-07-03 |
| 9865466 | Silicide phase control by confinement | Ellie Yieh, Mehul Naik, Srinivas D. Nemani | 2018-01-09 |