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| 9947581 |
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| 9947579 |
Copper interconnect structure with manganese oxide barrier layer |
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| 9947622 |
Ultrathin superlattice of MnO/Mn/MnN and other metal oxide/metal/metal nitride liners and caps for copper low dielectric constant interconnects |
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| 9934963 |
Multilayer dielectric structures with graded composition for nano-scale semiconductor devices |
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| 9892961 |
Air gap spacer formation for nano-scale semiconductor devices |
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| 9859212 |
Multi-level air gap formation in dual-damascene structure |
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2018-01-02 |
