Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115629 | Air gap spacer formation for nano-scale semiconductor devices | Kangguo Cheng, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen +2 more | 2018-10-30 |
| 9892961 | Air gap spacer formation for nano-scale semiconductor devices | Kangguo Cheng, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen +2 more | 2018-02-13 |