Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more | 2018-08-28 |
| 9983482 | Radiation collector, radiation source and lithographic apparatus | Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more | 2018-05-29 |
| 9897926 | Stage positioning system and lithographic apparatus | Wilhelmus Henricus Theodorus Maria Aangenent, Lucas Koorneef, Theo Anjes Maria Ruijl, Stanley Constant Johannes Martinus Van Den Berg, Stan Henricus Van Der Meulen +2 more | 2018-02-20 |