Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox | 2018-12-11 |
| 10049863 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2018-08-14 |
| 9865489 | Substrate support chuck cooling for deposition chamber | Vijay D. Parkhe, Robert T. Hirahara, Dan DEYO | 2018-01-09 |