Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049908 | Methods and apparatus for electrostatic chuck repair and refurbishment | Govinda Raj | 2018-08-14 |
| 9917001 | High temperature fine grain aluminum heater | Abhi Desai, Calvin Augason | 2018-03-13 |
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Dan DEYO | 2018-01-09 |