Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141153 | Magnetron having enhanced cooling characteristics | Simon Yavelberg, Ramprakash Sankarakrishnan | 2018-11-27 |
| 10049908 | Methods and apparatus for electrostatic chuck repair and refurbishment | Robert T. Hirahara | 2018-08-14 |
| 10005025 | Corrosion resistant abatement system | Monika Agarwal, Hamid Mohiuddin, Kadthala Ramaya Narendrnath | 2018-06-26 |