Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160093 | Carrier head membrane roughness to control polishing rate | Young J. Paik, Ashish Bhatnagar | 2018-12-25 |
| 10131126 | Methods for bonding substrates | Gangadhar Sheelavant, Monika Agarwal, Ashish Bhatnagar | 2018-11-20 |
| 10056284 | Electrostatic chuck optimized for refurbishment | Vijay D. Parkhe | 2018-08-21 |
| 10005025 | Corrosion resistant abatement system | Govinda Raj, Monika Agarwal, Hamid Mohiuddin | 2018-06-26 |
| 9993907 | Printed chemical mechanical polishing pad having printed window | Laxman Murugesh | 2018-06-12 |