Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160093 | Carrier head membrane roughness to control polishing rate | Young J. Paik, Kadthala Ramaya Narendrnath | 2018-12-25 |
| 10131126 | Methods for bonding substrates | Kadthala Ramaya Narendrnath, Gangadhar Sheelavant, Monika Agarwal | 2018-11-20 |
| 9960019 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Sandhya Arun, Prashanth Kodigepalli, Padma Gopalakrishnan, Dan Martin, Christopher Heath John Hossack | 2018-05-01 |