Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141153 | Magnetron having enhanced cooling characteristics | Govinda Raj, Ramprakash Sankarakrishnan | 2018-11-27 |
| 10094788 | Surface acoustic wave sensors in semiconductor processing equipment | Ramesh Gopalan, Zubin Huang | 2018-10-09 |
| 10029346 | External clamp ring for a chemical mechanical polishing carrier head | Patrick Ala, Bo Ding, Yongqi Hu, Mats Larsson | 2018-07-24 |
| 9878421 | Chemical mechanical polishing retaining ring with integrated sensor | — | 2018-01-30 |