Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029346 | External clamp ring for a chemical mechanical polishing carrier head | Patrick Ala, Bo Ding, Simon Yavelberg, Mats Larsson | 2018-07-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10029346 | External clamp ring for a chemical mechanical polishing carrier head | Patrick Ala, Bo Ding, Simon Yavelberg, Mats Larsson | 2018-07-24 |