Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2018-01-09 | $16,545,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9865489 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2018-01-09 | $16,545,000 |