Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Roger M. Johnson, Michael S. Cox | 2018-12-11 |
| 10037064 | Enhanced re-hosting capability for legacy hardware and software | Mark Roger Covington, Suresh Kumaraswami, Amitabh Puri | 2018-07-31 |
| 9987718 | Pneumatic connection to carrier head | — | 2018-06-05 |
| 9892947 | Sensor system for semiconductor manufacturing apparatus | Raphael Dascoli, Shivan Bhargava | 2018-02-13 |