Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson | 2018-12-11 |
| 10049863 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2018-08-14 |
| 9984912 | Locally heated multi-zone substrate support | — | 2018-05-29 |
| 9867238 | Apparatus for treating an exhaust gas in a foreline | Colin John Dickinson | 2018-01-09 |