Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049863 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2018-08-14 |
| 9937601 | Retaining ring with Shaped Surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2018-04-10 |