| 10105812 |
Polishing pad configuration and polishing pad support |
— |
2018-10-23 |
| 10076817 |
Orbital polishing with small pad |
Paul D. Butterfield, Jay Gurusamy, Jason Garcheung Fung, Shou-Sung Chang, Jimin Zhang +1 more |
2018-09-18 |
| 10022837 |
Inner retaining ring and outer retaining ring for carrier head |
Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang, Gautam Shashank Dandavate |
2018-07-17 |
| 9987724 |
Polishing system with pad carrier and conditioning station |
Jay Gurusamy |
2018-06-05 |
| 9937601 |
Retaining ring with Shaped Surface |
Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more |
2018-04-10 |
| 9873179 |
Carrier for small pad for chemical mechanical polishing |
Hui Chen, Steven M. Zuniga, Eric Lau, Garrett H. Sin, Shou-Sung Chang |
2018-01-23 |
| 9862070 |
Systems and methods for substrate polishing end point detection using improved friction measurement |
Shou-Sung Chang, Lakshmanan Karuppiah, Paul D. Butterfield, Erik S. Rondum |
2018-01-09 |
