Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Jay Gurusamy, Jason Garcheung Fung, Shou-Sung Chang, Jimin Zhang +1 more | 2018-09-18 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Lakshmanan Karuppiah, Erik S. Rondum | 2018-01-09 |