Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Shou-Sung Chang, Hung Chih Chen, Paul D. Butterfield, Erik S. Rondum | 2018-01-09 |