Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10076817 | Orbital polishing with small pad | Hung Chih Chen, Paul D. Butterfield, Jay Gurusamy, Jason Garcheung Fung, Jimin Zhang +1 more | 2018-09-18 |
| 9873179 | Carrier for small pad for chemical mechanical polishing | Hui Chen, Steven M. Zuniga, Hung Chih Chen, Eric Lau, Garrett H. Sin | 2018-01-23 |
| 9862070 | Systems and methods for substrate polishing end point detection using improved friction measurement | Hung Chih Chen, Lakshmanan Karuppiah, Paul D. Butterfield, Erik S. Rondum | 2018-01-09 |