Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Hikaru Adachi, Hiroyuki Miyashita, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 9663856 | Plasma processing apparatus and shower plate | Shigeru Kasai, Taro Ikeda | 2017-05-30 |
| 9640388 | Method for forming insulating film and method for manufacturing semiconductor device | Shigeru Kasai, Kotaro Miyatani, Takuya Kurotori, Kenichi KOTE, Akira Tanihara +1 more | 2017-05-02 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada +1 more | 2017-01-17 |