Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552966 | Antenna for plasma generation, plasma processing apparatus and plasma processing method | Taro Ikeda, Shigeru Kasai | 2017-01-24 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9543123 | Plasma processing apparatus and plasma generation antenna | Taro Ikeda, Shigeru Kasai | 2017-01-10 |