Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Yutaka Fujino, Hikaru Adachi, Hiroyuki Miyashita, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 9704693 | Power combiner and microwave introduction mechanism | Hiroyuki Miyashita | 2017-07-11 |
| 9663856 | Plasma processing apparatus and shower plate | Shigeru Kasai, Yutaka Fujino | 2017-05-30 |
| 9552966 | Antenna for plasma generation, plasma processing apparatus and plasma processing method | Tomohito Komatsu, Shigeru Kasai | 2017-01-24 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9543123 | Plasma processing apparatus and plasma generation antenna | Tomohito Komatsu, Shigeru Kasai | 2017-01-10 |