Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847689 | Motor | Tetsuo Hoshina | 2017-12-19 |
| 9663856 | Plasma processing apparatus and shower plate | Taro Ikeda, Yutaka Fujino | 2017-05-30 |
| 9640388 | Method for forming insulating film and method for manufacturing semiconductor device | Kotaro Miyatani, Takuya Kurotori, Kenichi KOTE, Yutaka Fujino, Akira Tanihara +1 more | 2017-05-02 |
| 9552966 | Antenna for plasma generation, plasma processing apparatus and plasma processing method | Tomohito Komatsu, Taro Ikeda | 2017-01-24 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Hiroyuki Miyashita, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |
| 9543123 | Plasma processing apparatus and plasma generation antenna | Taro Ikeda, Tomohito Komatsu | 2017-01-10 |