Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hikaru Adachi, Yuki Osada, Nobuhiko Yamamoto | 2017-07-11 |
| 9704693 | Power combiner and microwave introduction mechanism | Taro Ikeda | 2017-07-11 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Yuki Osada, Akira Tanihara +1 more | 2017-01-17 |