Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hikaru Adachi, Hiroyuki Miyashita, Nobuhiko Yamamoto | 2017-07-11 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Akira Tanihara +1 more | 2017-01-17 |