Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640388 | Method for forming insulating film and method for manufacturing semiconductor device | Shigeru Kasai, Kotaro Miyatani, Takuya Kurotori, Kenichi KOTE, Yutaka Fujino +1 more | 2017-05-02 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Yuki Osada +1 more | 2017-01-17 |