Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777369 | Method of depositing a film, recording medium, and film deposition apparatus | Hitoshi Kato, Masahiro Murata, Kentaro Oshimo | 2017-10-03 |
| 9714467 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano | 2017-07-25 |
| 9711370 | Substrate processing apparatus and method of processing a substrate | Hitoshi Kato, Jun Sato, Hiroyuki Kikuchi | 2017-07-18 |
| 9693434 | Dimming device and illumination system using same | Kei Miura, Kiyoshi Gotou, Takeo Suzuki | 2017-06-27 |
| 9607828 | Method of depositing a silicon-containing film | Jun Sato | 2017-03-28 |
| 9601318 | Plasma processing method and plasma processing apparatus | Hitoshi Kato, Jun Sato, Toshiyuki Nakatsubo, Hiroyuki Kikuchi | 2017-03-21 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato +2 more | 2017-02-28 |
| 9583318 | Plasma processing apparatus, plasma processing method, and recording medium | Takeshi Kobayashi, Katsuaki Sugawara, Naohide Ito | 2017-02-28 |