Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607866 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Akira Koshiishi | 2017-03-28 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Yohei Yamazawa, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +2 more | 2017-02-28 |