Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627181 | Plasma processing apparatus | — | 2017-04-18 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +2 more | 2017-02-28 |