Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9817357 | Sheet processing apparatus, control method, and image forming apparatus capable of forming folding stripe on sheets | Yasuo Fukatsu | 2017-11-14 |
| 9777369 | Method of depositing a film, recording medium, and film deposition apparatus | Masahiro Murata, Kentaro Oshimo, Shigehiro Miura | 2017-10-03 |
| 9714467 | Method for processing a substrate and substrate processing apparatus | Jun Sato, Masahiro Murata, Kentaro Oshimo, Tomoko Sugano, Shigehiro Miura | 2017-07-25 |
| 9711370 | Substrate processing apparatus and method of processing a substrate | Shigehiro Miura, Jun Sato, Hiroyuki Kikuchi | 2017-07-18 |
| 9702043 | Substrate processing apparatus | Katsuyuki Hishiya | 2017-07-11 |
| 9677174 | Film deposition method for producing a reaction product on a substrate | Takeshi Kumagai | 2017-06-13 |
| 9601318 | Plasma processing method and plasma processing apparatus | Shigehiro Miura, Jun Sato, Toshiyuki Nakatsubo, Hiroyuki Kikuchi | 2017-03-21 |
| 9580802 | Film formation method and apparatus for semiconductor process | Kohichi Orito | 2017-02-28 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Mitsuhiro Tachibana, Takeshi Kobayashi +2 more | 2017-02-28 |