Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711370 | Substrate processing apparatus and method of processing a substrate | Shigehiro Miura, Hitoshi Kato, Jun Sato | 2017-07-18 |
| 9601318 | Plasma processing method and plasma processing apparatus | Shigehiro Miura, Hitoshi Kato, Jun Sato, Toshiyuki Nakatsubo | 2017-03-21 |
| 9586760 | Electronic component transfer shuttle | Haruki Nakajima, Tsuyoshi Yamashita | 2017-03-07 |
| 9546768 | Vehicle headlamp | Teppei Muramatsu, Masayuki Kondo, Shigeru Kuwahara | 2017-01-17 |