Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777369 | Method of depositing a film, recording medium, and film deposition apparatus | Hitoshi Kato, Masahiro Murata, Shigehiro Miura | 2017-10-03 |
| 9714467 | Method for processing a substrate and substrate processing apparatus | Hitoshi Kato, Jun Sato, Masahiro Murata, Tomoko Sugano, Shigehiro Miura | 2017-07-25 |