Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677174 | Film deposition method for producing a reaction product on a substrate | Hitoshi Kato | 2017-06-13 |
| 9667548 | Relay apparatus and relay method | Yuichi Ishikawa, Kentarou Sugawara, Naoya Kumita | 2017-05-30 |
| 9551068 | Film forming method and film forming apparatus | Muneyuki OTANI, Kazuya Okubo | 2017-01-24 |